Journal of Micro/ Nanolithography, MEMS, and MOEMS

• Print-ISSN 19325150
• E-ISSN 19325134
• Active or Inactive Active
• Article language in source(three-letter ISO language codes) ENG
• Related title to title history indication Journal of Microlithography, Microfabrication and Microsystems
• Publisher's Name S P I E - International Society for Optical Engineering
• Publisher imprints grouped to main Publisher SPIE
• Publisher's Country United States
• All Science Classification Codes (ASJC) Electrical and Electronic Engineering
• All Science Classification Codes (ASJC) Mechanical Engineering
• All Science Classification Codes (ASJC) Condensed Matter Physics
• All Science Classification Codes (ASJC) Atomic and Molecular Physics, and Optics
• All Science Classification Codes (ASJC) Electronic, Optical and Magnetic Materials
• 2016 CiteScore 1.21
• 2016 SJR 0.343
• 2016 SNIP 0.829