Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

• Print-ISSN 0734211X
• Active or Inactive Inactive
• Related title to title history indication Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
• Other related title 1 Journal of Vacuum Science and Technology
• Publisher's Name American Institute of Physics
• Publisher imprints grouped to main Publisher American Institute of Physics
• Publisher's Country United States
• All Science Classification Codes (ASJC) General Engineering