Journal of Vacuum Science and Technology

• Print-ISSN 225355
• Active or Inactive Inactive
• Related title to title history indication Journal of Vacuum Science and Technology A
• Other related title 1 Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
• Publisher's Name American Institute of Physics
• Publisher imprints grouped to main Publisher American Institute of Physics
• Publisher's Country United States
• All Science Classification Codes (ASJC) General Engineering