Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

• Print-ISSN 21662754
• Active or Inactive Active
• Article language in source(three-letter ISO language codes) ENG
• Related title to title history indication Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
• Publisher's Name AVS Science and Technology Society
• Publisher imprints grouped to main Publisher AVS Science and Technology Society
• Publisher's Country United States
• All Science Classification Codes (ASJC) Materials Chemistry
• All Science Classification Codes (ASJC) Electrical and Electronic Engineering
• All Science Classification Codes (ASJC) Surfaces, Coatings and Films
• All Science Classification Codes (ASJC) Process Chemistry and Technology
• All Science Classification Codes (ASJC) Instrumentation
• All Science Classification Codes (ASJC) Electronic, Optical and Magnetic Materials
• 2016 CiteScore 1.08
• 2016 SJR 0.444
• 2016 SNIP 0.499